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PRINCIPLES OF MICROELECTROMECHANICAL SYSTEM /

Lee, Ki Bang

PRINCIPLES OF MICROELECTROMECHANICAL SYSTEM / Ki Bang Lee. - xii, 667 psges. : illustration. ; 24 cm.

Includes index

ISBN: 9780470466346

Subjects--Topical Terms:
Microelectromechanical systems.

LC Class. No.: TK7875 / .P75 2011

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