A (not so) short introduction to MEMS [electronic resource] / Tranck Chollet, Hoabing Liu

By: Contributor(s): Material type: TextTextPublication details: [Sl : memscylopedia.org, 2012Description: 208p. : illISBN:
  • 9782954201504
Other title:
  • Introduction to MEMS
Subject(s): LOC classification:
  • TK7875
Online resources:
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