Campbell, Stephen A.    <br/><br/>
The science and engineering of microelectronic fabrication /  
Atephen A. Campbell    
 - New York :  Oxford University Press,   c1996    
 - xv, 536 p. :  ill.;   25 cm.    
 - The Oxford series in electrical engineering    .
<br/><br/>Includes index    
<br/><br/><label>ISBN: </label>0195105087    
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction