TY  - BOOK
AU  - Chollet,Franck
AU  - Liu,Haobing
TI  - A (not so) short introduction to MEMS 
SN  - 9782954201504
AV  - TK7875 
PY  - 2012///
CY  - [Sl
PB  - memscylopedia.org, 
KW  - Microelectromechanical systems
UR  - http://memscyclopedia.org/Document/introMEMS.pdf
ER  -