TY  - BOOK
AU  - Lee,Ki Bang
TI  - PRINCIPLES OF MICROELECTROMECHANICAL SYSTEM
SN  - 9780470466346
AV  - TK7875 .P75 2011
PY  - 2011///
PY  - 2010///
CY  - Hoboken, New Jersey
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
N1  - Includes index
ER  -