May, Gary S.    <br/><br/>
Fundamentals of semiconductor manufacturing and process control /  
Gary S. May [and] Costas J. Spanos    
 - New Jersey :  John Wiley & Sons,   2006.    
 - xix; 463p. :  ill.;   24cm.    
<br/><br/>Includes bibliographical references and index    
<br/><br/><label>ISBN: </label>0471784060    
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction   <br/>Process control--Statistical methods   <br/>Semiconductors--Design and construction