TY  - BOOK
AU  - May,Gary S.
AU  - Spanos,Costas J.
TI  - Fundamentals of semiconductor manufacturing and process control / 
SN  - 0471784060   
PY  - 2006///.
CY  - New Jersey
PB  - John Wiley & Sons, 
KW  - Integrated circuits
KW  - Design and construction
KW  - Process control
KW  - Statistical methods
KW  - Semiconductors
N1  - Includes bibliographical references and index
ER  -