| 000 | 00758nam a2200241 a 4500 | ||
|---|---|---|---|
| 005 | 20230918165015.0 | ||
| 007 | cr cn aaaaa | ||
| 008 | 130316s2012 |||||s|||| 00| 0 eng d | ||
| 020 | _a9782954201504 | ||
| 040 |
_aPSP _cPSP |
||
| 050 | 4 | _aTK7875 | |
| 100 | 1 |
_aChollet, Franck _98158 |
|
| 245 | 1 | 2 |
_aA (not so) short introduction to MEMS _h[electronic resource] / _cTranck Chollet, Hoabing Liu |
| 246 | 3 | 0 | _aIntroduction to MEMS |
| 260 |
_a[Sl : _bmemscylopedia.org, _c2012 |
||
| 300 |
_a208p. : _bill. |
||
| 538 | _aMode of access: Internet | ||
| 650 | 0 |
_aMicroelectromechanical systems _98159 |
|
| 700 | 1 |
_aLiu, Haobing _98160 |
|
| 856 | 4 | 0 |
_3Available online _uhttp://memscyclopedia.org/Document/introMEMS.pdf |
| 942 |
_2lcc _cBK |
||
| 959 | _aAHR | ||
| 999 |
_c39841 _d39841 |
||